[PD-1-4] Theoretical Analysis of Hydrogen-Related Defects in SiO2 Thin Film by Molecular Orbital Method

Takeshi KANASHIMA、Masanori OKUYAMA、Yoshihiro HAMAKAWA (1.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1996.PD-1-4