The Japan Society of Applied Physics

[PD-1-6] Local Atomic Bonding in Fluorinated Silicon Oxides: Static Dielectric Constant and Chemical Stability

Gerald LUCOVSKY、Hang-Yang YANG (1.North Carolina State University, Departments of Physics, Materials Science and Engineering, and Electrical and Computer Engineering)

https://doi.org/10.7567/SSDM.1996.PD-1-6