Metallic Impurity Growing Behavior on Surface Crystal Structure

Geun-Min CHOI; Katsuyuki SEKINE; Hiroshi MORITA; Tadahiro OHMI

doi:https://doi.org/10.7567/SSDM.1996.PD-2-1

[PD-2-1] Metallic Impurity Growing Behavior on Surface Crystal Structure

Geun-Min CHOI、Katsuyuki SEKINE、Hiroshi MORITA、Tadahiro OHMI (1.Memory R & D Division, Hyundai Electronics Industries, Co., LTD、2.Department of Electronic Engineering, Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1996.PD-2-1

1996 International Conference on Solid State Devices and Materials

[PD-2-1] Metallic Impurity Growing Behavior on Surface Crystal Structure