[PD-2-1] Metallic Impurity Growing Behavior on Surface Crystal Structure

Geun-Min CHOI, Katsuyuki SEKINE, Hiroshi MORITA, Tadahiro OHMI (1.Memory R & D Division, Hyundai Electronics Industries, Co., LTD, 2.Department of Electronic Engineering, Faculty of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1996.PD-2-1