[PD-2-4] Transient Oxide Layer at a Thermally Grown SiO2/Si Interface, Interpreted Based on Local Vibration and X-Ray Reflectivity

Yoshihiro SUGITA, Naoki AWAJI, Satoru WATANABE (1.Fujitsu Laboratories ltd.)

https://doi.org/10.7567/SSDM.1996.PD-2-4