The Japan Society of Applied Physics

[PD-2-8] Scanning Tunneling Microscopy Observation on the Atomic Structures of Step Edges and Etch Pits on NH4F-Treated Si(111) Surface

H. Sakaue, E. Takahashi, T. Tanaka, A. Kojima, M. Osada, S. Shingubara, T. Takahagi (1.Department of Electrical Engineering, Faculty of Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1996.PD-2-8