[PD-3-4] Atomistic Observation of Titanium Adsorption and Initial Growth of Titanium Silicide on Si(111)

H. Kuriyama, S. Tatsukawa, M. Umekawa, S. Ohara, S. Matsumoto (1.Department of Electrical Engineering, Keio University)

https://doi.org/10.7567/SSDM.1996.PD-3-4