[PD-3-5] Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors

Yuichi MATSUI、Keiko KUSHIDA、Hiroshi MIKI、Kazuyoshi TORII、Yoshihisa FUJISAKI (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1996.PD-3-5