[PD-4-7] Effects of Thermal Stability of Si1-x-yGexCy Layers on Properties of Their Contacts with Aluminum

Jian MI, Ashawant GUPTA, Cary Y. YANG, Jintian ZHU, Paul K. L. YU, Patricia WARREN, Michel DUTOIT (1.Microelectronics Laboratory, Santa Clara University, 2.Department of Electrical and Computer Engineering, University of California, 3.Institute for Micro- and Optoelectronics, Department of Physics Swiss Federal Institute of Technology)

https://doi.org/10.7567/SSDM.1996.PD-4-7