[PD-5-5] Monolayer Steps Formation in InP and GaInAs by OMVPE and Reduction of Resonant Energy Width in GaInAs/InP RTDs

Michihiko SUHARA、Chuma NAGAO、Hidetaka HONJI、Yasuyuki MIYAMOTO、Kazuhito FURUYA、Riichiro TAKEMURA (1.Research Center for Quantum Effect Electronics, Tokyo Institute of Technology、2.Department of Electrical and Electric Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1996.PD-5-5