[PD-5-5] Monolayer Steps Formation in InP and GaInAs by OMVPE and Reduction of Resonant Energy Width in GaInAs/InP RTDs

Michihiko SUHARA, Chuma NAGAO, Hidetaka HONJI, Yasuyuki MIYAMOTO, Kazuhito FURUYA, Riichiro TAKEMURA (1.Research Center for Quantum Effect Electronics, Tokyo Institute of Technology, 2.Department of Electrical and Electric Engineering, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1996.PD-5-5