[PD-6-2] Formation of InGaAs/InAlAs Quantum Wires and Dots with Extremely Smooth Facets on Mesa-Patterned (001)InP Substrates by Selective Molecular Beam Epitaxy

Moriaki ARAKI, Yuuki HANADA, Hajime FUJIKURA, Hideki HASEGAWA (1.Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.1996.PD-6-2