Formation of c-Axis-Oriented Bi4Ti3O12 Films with Extremely Flat Surface by Spin-Coating

1996 International Conference on Solid State Devices and Materials

Aug 26, 1996 - Aug 29, 1996
Pacifico Yokohama, Yokohama, Japan

Kouichi TANI, Tomomi YAMANOBE, Hideaki MATSUHASHI, Satoshi NISHIKAWA (1.Semiconductor Tech. Lab., Oki Electric Industry Co., Ltd.)