[Sympo.II-9] Novel Porous Films Having Low Dielectric Constants Synthesized by a Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics

Nobuo Aoi (1.Semiconductor Research Center, Matsushita Electric Industrial Co. Ltd.)

https://doi.org/10.7567/SSDM.1996.Sympo.II-9