Successful Passivation of Air-Exposed AlGaAs Surfaces by a Silicon Interface Control Layer-Based Technique

Kengo IKEYA; Satoshi KODAMA; Tamotsu HASHIZUME; Hideki HASEGAWA

doi:https://doi.org/10.7567/SSDM.1996.Sympo.IV-12

[Sympo.IV-12] Successful Passivation of Air-Exposed AlGaAs Surfaces by a Silicon Interface Control Layer-Based Technique

Kengo IKEYA、Satoshi KODAMA、Tamotsu HASHIZUME、Hideki HASEGAWA (1.Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.1996.Sympo.IV-12

1996 International Conference on Solid State Devices and Materials

[Sympo.IV-12] Successful Passivation of Air-Exposed AlGaAs Surfaces by a Silicon Interface Control Layer-Based Technique