[Sympo.IV-6] Scanning Capacitance Microscopy as a Characterization Tool for Semiconductor Devices

Takuma YAMAMOTO, Yoshihiko SUZUKI, Masayuki MIYASHITA, Hiroyuki SUGIMURA, Nobuyuki NAKAGIRI (1.Tsukuba Research Lab., Nikon Co., 2.Optomechatronics R&D department, Nikon Co., 3.SPM Promotion Section, Nikon Co.)

https://doi.org/10.7567/SSDM.1996.Sympo.IV-6