Scanning Capacitance Microscopy as a Characterization Tool for Semiconductor Devices

Takuma YAMAMOTO; Yoshihiko SUZUKI; Masayuki MIYASHITA; Hiroyuki SUGIMURA; Nobuyuki NAKAGIRI

doi:https://doi.org/10.7567/SSDM.1996.Sympo.IV-6

[Sympo.IV-6] Scanning Capacitance Microscopy as a Characterization Tool for Semiconductor Devices

Takuma YAMAMOTO、Yoshihiko SUZUKI、Masayuki MIYASHITA、Hiroyuki SUGIMURA、Nobuyuki NAKAGIRI (1.Tsukuba Research Lab., Nikon Co.、2.Optomechatronics R&D department, Nikon Co.、3.SPM Promotion Section, Nikon Co.)

https://doi.org/10.7567/SSDM.1996.Sympo.IV-6

1996 International Conference on Solid State Devices and Materials

[Sympo.IV-6] Scanning Capacitance Microscopy as a Characterization Tool for Semiconductor Devices