[A-14-1] Current Status of 200 mm and 300 mm Silicon Wafers

Howard R. Huff、D. W. McCormack、Jr. Chi Au、Troy Messina、Kevin Chan、Randal K. Goodall (1.SEMATECH、2.I300I)

https://doi.org/10.7567/SSDM.1997.A-14-1