[A-14-1] Current Status of 200 mm and 300 mm Silicon Wafers

Howard R. Huff, D. W. McCormack, Jr. Chi Au, Troy Messina, Kevin Chan, Randal K. Goodall (1.SEMATECH, 2.I300I)

https://doi.org/10.7567/SSDM.1997.A-14-1