[A-14-2] Iron Gettering Controlled by Size and Density of Oxygen Precipitates in CZ Silicon

Hideki Takahashi, Hiroshi Yamada-Kaneta, Masashi Suezawa (1.Process Division, Fujitsu, Ltd., 2.Institute for Materials Research, Tohoku University)

https://doi.org/10.7567/SSDM.1997.A-14-2