[A-5-6] New Nondestructive Carrier Profiling for Ion Implanted Si Using Infrared Spectroscopic Ellipsometry

Takuya Sakamoto、Hiroyuki Nakano、Yoshinari Kamakura、Kenji Taniguchi、Kenji Nishi、Hiroto Nagano (1.Department of Electronics and Information Systems, Osaka University、2.STARC)

https://doi.org/10.7567/SSDM.1997.A-5-6