[A-5-6] New Nondestructive Carrier Profiling for Ion Implanted Si Using Infrared Spectroscopic Ellipsometry

Takuya Sakamoto, Hiroyuki Nakano, Yoshinari Kamakura, Kenji Taniguchi, Kenji Nishi, Hiroto Nagano (1.Department of Electronics and Information Systems, Osaka University, 2.STARC)

https://doi.org/10.7567/SSDM.1997.A-5-6