[A-6-2] Characterization of Corner Induced Leakage Current in Shallow Silicided n+/p Junction

Hi-Deok Lee, Jong-Wan Jung, Hyun-Sang Hwang, Kye-Nam Lee, Young-Jong Lee, Jeong-Mo Hwang (1.Advan. Tech. Lab., LG Semicon Co., Ltd.)

https://doi.org/10.7567/SSDM.1997.A-6-2