Ultra-Shallow Junotion Formation by AsH3 Adsorption Method

Y. H. Song; S. Pidin; T. Kurabayashi; H. Kurino; M. Koyanagi

doi:https://doi.org/10.7567/SSDM.1997.A-6-7

1997 International Conference on Solid State Devices and Materials

Sep 16, 1997 - Sep 19, 1997
ACT CITY Hamamatsu, Hamamatsu, Japan

[A-6-7] Ultra-Shallow Junotion Formation by AsH3 Adsorption Method

Y. H. Song, S. Pidin, T. Kurabayashi, H. Kurino, M. Koyanagi (1.Department of Machine Intelligence and System Engineering, Department of Mechatronics and Precision Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1997.A-6-7

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