[A-6-7] Ultra-Shallow Junotion Formation by AsH3 Adsorption Method

Y. H. Song、S. Pidin、T. Kurabayashi、H. Kurino、M. Koyanagi (1.Department of Machine Intelligence and System Engineering, Department of Mechatronics and Precision Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1997.A-6-7