[B-1-5] The Effect of Capacitor Electrode Contaminant on High Density DRAM's Device Characteristics

Y. Kawai、E. Uchida、M. Itoh、M. Yoshimaru、J. Ida (1.Oki Electric Industry Co., Ltd. VLSI R&D Center)

https://doi.org/10.7567/SSDM.1997.B-1-5