Delta-Doping of Si on GaAs Vicinal Surfaces and Its Possibility of Wirelike Incorporation in Metalorganic Vapor Phase Epitaxial Growth

[B-10-7] Delta-Doping of Si on GaAs Vicinal Surfaces and Its Possibility of Wirelike Incorporation in Metalorganic Vapor Phase Epitaxial Growth

Tomoki Irisawa, Junichi Motohisa, Masashi Akabori, Takashi Fukui (1.Research Center for Interface Quantum Electronics, Hokkaido University)