[B-10-8] W/Cr/Au/SiO2 Composite Alignment Mark for Fabrication of Interference/Diffraction Hot Electron Devices

Hiroo Hongo, Yasuyuki Miyamoto, Jun Suzuki, Tetsuya Hattori, Atsushi Kokubo, Michihiko Suhara, Kazuhito Furuya (1.Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Research center for Quantum Effect Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1997.B-10-8