Controlled Formation of Narrow and Uniform InGaAs Ridge Quantum Wire Arrays on Patterned InP Substrates by Selective Molecular Beam Epitaxy

Hajime Fujikura; Yuuki Hanada; Michio Kihara; Hideki Hasegawa

doi:https://doi.org/10.7567/SSDM.1997.B-11-2

[B-11-2] Controlled Formation of Narrow and Uniform InGaAs Ridge Quantum Wire Arrays on Patterned InP Substrates by Selective Molecular Beam Epitaxy

Hajime Fujikura、Yuuki Hanada、Michio Kihara、Hideki Hasegawa (1.Research Center for Interface Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.1997.B-11-2

1997 International Conference on Solid State Devices and Materials

[B-11-2] Controlled Formation of Narrow and Uniform InGaAs Ridge Quantum Wire Arrays on Patterned InP Substrates by Selective Molecular Beam Epitaxy