AFM Study of Phthalocyanine-Based Thin Film Gas Sensor

Tadashi Nagasawa; Kenji Murakami; Kenzo Watanabe

doi:https://doi.org/10.7567/SSDM.1997.B-11-8

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜 1997年9月19日
ACT CITY Hamamatsu, Hamamatsu, Japan

[B-11-8] AFM Study of Phthalocyanine-Based Thin Film Gas Sensor

Tadashi Nagasawa、Kenji Murakami、Kenzo Watanabe (1.Graduate School of Electronic Science and Technology and Research Institute of Electronics, Shizuoka University)

https://doi.org/10.7567/SSDM.1997.B-11-8

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