[B-12-4] Si Pillar Formation and Height Control by Furnace Oxidation of the Si (111) Surface with Ultra-Small SiN Nuclei

Takeshi Yamamoto, Tadashi Nagasawa, Kenji Murakami, Michiharu Tabe (1.Research Institute of Electronics, Shizuoka University)

https://doi.org/10.7567/SSDM.1997.B-12-4