[B-13-2] Fabrication of Nanometer-Scale Vertical MIM Tunnel Junctions Using a Double-Layered Inorganic Resist

Satoshi Haraichi, Toshimi Wada, Sucheta M. Gorwadkar, Kenichi Ishii (1.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1997.B-13-2