[B-2-1] Properties of Highly Oriented Ta2O5 on Metal Electrodes

Koichi Kishiro, Nobuhiko Inoue, Shih-Chang Chen, Masaki Yoshimaru (1.VLSI R&D Center, Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1997.B-2-1