[B-2-2] Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO2 Interlayer

Tomonobu HATA、Yutaka MASUDA、Shin'ichi NAKANO、Kimihiro SASAKI、Yohko HANEDA、Kiyotaka WASA (1.Department of Electrical and Computer Engineering, Kanazawa University、2.RITE)

https://doi.org/10.7567/SSDM.1997.B-2-2