[B-2-2] Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO2 Interlayer

Tomonobu HATA, Yutaka MASUDA, Shin'ichi NAKANO, Kimihiro SASAKI, Yohko HANEDA, Kiyotaka WASA (1.Department of Electrical and Computer Engineering, Kanazawa University, 2.RITE)

https://doi.org/10.7567/SSDM.1997.B-2-2