[B-2-4] Propose of New Mixture Target for Low Temperature and High Rate Deposition of PZT Thin Films by Reactive Sputtering

Tomonobu HATA, WeiXiao ZHANG, Shinya KAWAGOE, Kimihiro SASAKI (1.Department of Electrical and Computer Engineering, Kanazawa University)

https://doi.org/10.7567/SSDM.1997.B-2-4