Photonic Integrated Circuits Fabricated by Bandgap-Energy-Controlled Selective MOVPE Technique

Tatsuya Sasaki; Masayuki Yamaguchi; Keiro Komatsu

doi:https://doi.org/10.7567/SSDM.1997.C-1-4

[C-1-4] Photonic Integrated Circuits Fabricated by Bandgap-Energy-Controlled Selective MOVPE Technique

Tatsuya Sasaki, Masayuki Yamaguchi, Keiro Komatsu (1.Optoelectronics and High Frequency Device Research Laboratories, NEC Corporation, 2.ULSI Device Development Labs., NEC Corp.)

https://doi.org/10.7567/SSDM.1997.C-1-4

1997 International Conference on Solid State Devices and Materials

[C-1-4] Photonic Integrated Circuits Fabricated by Bandgap-Energy-Controlled Selective MOVPE Technique