Photonic Integrated Circuits Fabricated by Bandgap-Energy-Controlled Selective MOVPE Technique

Tatsuya Sasaki; Masayuki Yamaguchi; Keiro Komatsu

doi:https://doi.org/10.7567/SSDM.1997.C-1-4

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜 1997年9月19日
ACT CITY Hamamatsu, Hamamatsu, Japan

[C-1-4] Photonic Integrated Circuits Fabricated by Bandgap-Energy-Controlled Selective MOVPE Technique

Tatsuya Sasaki、Masayuki Yamaguchi、Keiro Komatsu (1.Optoelectronics and High Frequency Device Research Laboratories, NEC Corporation、2.ULSI Device Development Labs., NEC Corp.)

https://doi.org/10.7567/SSDM.1997.C-1-4

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