[C-10-1] Highly Sensitive MOSFET Gas Sensors with Porous Platinum Gate Electrode

Hisashi Fukuda, Hiroaki Seo, Kouichirou Kasama, Toshiaki Endoh, Shigeru Nomura (1.Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology)

https://doi.org/10.7567/SSDM.1997.C-10-1