[C-11-5] Fabrication and Characterization of 14-nm-Gate-Length EJ-MOSFETs

Hisao Kawaura、Toshitsugu Sakamoto、Yukinori Ochiai、Jun'ichi Fujita、Toshio Baba (1.Fundamental Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1997.C-11-5