[C-11-5] Fabrication and Characterization of 14-nm-Gate-Length EJ-MOSFETs

Hisao Kawaura, Toshitsugu Sakamoto, Yukinori Ochiai, Jun'ichi Fujita, Toshio Baba (1.Fundamental Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1997.C-11-5