Simulation of 2-Dimensional Hole Gas for PMOS Devices with Phosphorus Pile-Up

Hiroshi Fujioka; Kanta Ono; Yoshiyuki Sato; Chenming Hu; Masaharu Oshima

doi:https://doi.org/10.7567/SSDM.1997.C-12-1

[C-12-1] Simulation of 2-Dimensional Hole Gas for PMOS Devices with Phosphorus Pile-Up

Hiroshi Fujioka, Kanta Ono, Yoshiyuki Sato, Chenming Hu, Masaharu Oshima (1.Department of Applied Chemistry, University of Tokyo, 2.NTT Laboratories, 3.University of California at Berkeley)

https://doi.org/10.7567/SSDM.1997.C-12-1

1997 International Conference on Solid State Devices and Materials

[C-12-1] Simulation of 2-Dimensional Hole Gas for PMOS Devices with Phosphorus Pile-Up