The Japan Society of Applied Physics

[C-5-7] Ohmic Contact of p-Type ZnSe Using Heavily Alkaline Doped p+-ZnSe by Excimer Laser Doping Technique

Toru Aoki, Akira Ishibashi, Masaharu Nagai, Yoshinori Hatanaka (1.Graduate School of Electronic Science and Technology, 2.Research Institute of Electronics, Shizuoka University, 3.Sony Corporation Research Center)

https://doi.org/10.7567/SSDM.1997.C-5-7