[C-9-4] Study of Drain Contact Structure Dependent Deep Submicron MOSFET Reliability by Photon Emission Analysis

Sang-Gi Lee、Donghoon Lee、Kye-Nam Lee、Young-Jong Lee、Yungseon Eo、Ju-Young Jeong、Oh-Kyong Kwon、Chang-Hyo Lee (1.Dept. of Physics Hanyang Univ.、2.Dept. of Elec. Eng., Hanyang Univ.、3.Dept. of Elec. Eng., The Univ. of Suwon、4.Advansed Technology Laboratory., LG Semicon Co.)

https://doi.org/10.7567/SSDM.1997.C-9-4