[C-9-4] Study of Drain Contact Structure Dependent Deep Submicron MOSFET Reliability by Photon Emission Analysis

Sang-Gi Lee, Donghoon Lee, Kye-Nam Lee, Young-Jong Lee, Yungseon Eo, Ju-Young Jeong, Oh-Kyong Kwon, Chang-Hyo Lee (1.Dept. of Physics Hanyang Univ., 2.Dept. of Elec. Eng., Hanyang Univ., 3.Dept. of Elec. Eng., The Univ. of Suwon, 4.Advansed Technology Laboratory., LG Semicon Co.)

https://doi.org/10.7567/SSDM.1997.C-9-4