[D-11-1] Ultrahigh Electron Mobilities in Si1-xGex/Si/Si1-xGex Heterostructures with Abrupt Interfaces Formed by Solid-Phase Epitaxy
Nobuyuki Sugii, Kiyokazu Nakagawa, Yoshinobu Kimura, Masanobu Miyao
(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1997.D-11-1