[D-11-1] Ultrahigh Electron Mobilities in Si1-xGex/Si/Si1-xGex Heterostructures with Abrupt Interfaces Formed by Solid-Phase Epitaxy

Nobuyuki Sugii、Kiyokazu Nakagawa、Yoshinobu Kimura、Masanobu Miyao (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1997.D-11-1