[D-11-4] Formation of Atomically Abrupt Si/Ge Hetero-Interface

Keiji Ikeda、Satoshi Sugahara、Yasutaka Uchida、Tomonori Nagai、Masakiyo Matsumura (1.Department of Physical Electronics, Tokyo Institute of Technology、2.Dept. of Electr. and Inform. Sci., Teikyo University of Science and Technology)

https://doi.org/10.7567/SSDM.1997.D-11-4