[D-11-4] Formation of Atomically Abrupt Si/Ge Hetero-Interface

Keiji Ikeda, Satoshi Sugahara, Yasutaka Uchida, Tomonori Nagai, Masakiyo Matsumura (1.Department of Physical Electronics, Tokyo Institute of Technology, 2.Dept. of Electr. and Inform. Sci., Teikyo University of Science and Technology)

https://doi.org/10.7567/SSDM.1997.D-11-4