[D-12-3] Layer-by-Layer Oxidation of Si(001) Surfaces

Heiji Watanabe、Ken Fujita、Takaaki Kawamura、Masakazu Ichikawa (1.Joint Research Center for Atom Technology, Angstrom Technology Partnership (JRCAT-ATP)、2.Department of Physics, Yamanashi University)

https://doi.org/10.7567/SSDM.1997.D-12-3